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Magnetically actuated micropumps using an Fe-PDMS composite membrane
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1860/792
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| Title: | Magnetically actuated micropumps using an Fe-PDMS composite membrane |
| Authors: | Nagel, Jonathan J.
Mikhail, George
Noh, Hongseok (Moses)
Koo, Jeonghoi |
| Keywords: | Microactuators
Metallic composites
Microelectronics |
| Issue Date: | 2006 |
| Publisher: | International Society for Optical Engineering |
| Citation: | Proceedings SPIE International Society for Optical Engineering 6172 (2006). Retrieved April 2006 from http://mems.mem.drexel.edu/actuator.pdf |
| Abstract: | In this paper we describe a novel Fe-PDMS composite that can be used to create magnetically actuated polymeric
microstructures. The composite is formed by suspending <10μm iron particles in polydimethylsiloxane (PDMS) at
concentrations ranging from 25-75% by weight. Material properties and processing capabilities have been examined,
and to demonstrate the usefulness of this material we have designed, fabricated and tested two prototypical micropumps
that utilize an Fe-PDMS actuator membrane. |
| URI: | http://hdl.handle.net/1860/792 |
| Appears in Collections: | Faculty Research and Publications (MEM)
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