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Please use this identifier to cite or link to this item: http://hdl.handle.net/1860/792

Title: Magnetically actuated micropumps using an Fe-PDMS composite membrane
Authors: Nagel, Jonathan J.
Mikhail, George
Noh, Hongseok (Moses)
Koo, Jeonghoi
Keywords: Microactuators;Metallic composites;Microelectronics
Issue Date: 2006
Publisher: International Society for Optical Engineering
Citation: Proceedings SPIE International Society for Optical Engineering 6172 (2006). Retrieved April 2006 from http://mems.mem.drexel.edu/actuator.pdf
Abstract: In this paper we describe a novel Fe-PDMS composite that can be used to create magnetically actuated polymeric microstructures. The composite is formed by suspending <10μm iron particles in polydimethylsiloxane (PDMS) at concentrations ranging from 25-75% by weight. Material properties and processing capabilities have been examined, and to demonstrate the usefulness of this material we have designed, fabricated and tested two prototypical micropumps that utilize an Fe-PDMS actuator membrane.
URI: http://hdl.handle.net/1860/792
Appears in Collections:Faculty Research and Publications (MEM)

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