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Characterization and stabilization of atmospheric pressure DC microplasmas and their application to thin film deposition
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1860/2998
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| Title: | Characterization and stabilization of atmospheric pressure DC microplasmas and their application to thin film deposition |
| Authors: | Staack, David Alexander |
| Keywords: | Mechanical engineering
Plasma engineering
Thin film devices -- Design and construction |
| Issue Date: | 2-Apr-2009 |
| URI: | http://hdl.handle.net/1860/2998 |
| Appears in Collections: | Drexel Theses and Dissertations
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