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Silicon as a millimeter-wave monolithically integrated substrate - A new look
Please use this identifier to cite or link to this item:
http://hdl.handle.net/1860/2665
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| Title: | Silicon as a millimeter-wave monolithically integrated substrate - A new look |
| Authors: | Rosen, Arye
Caulton, Martin
Stabile, Paul |
| Keywords: | Millimeter Waves
Integrated Circuits
Microwave Circuits
Silicon, Substrates
Fabrication
Hybrid Circuits
Ion Implantation
Laser Annealing
Mass Spectroscopy
Microstrip Devices
Technology Utilization |
| Issue Date: | 14-Feb-2008 |
| Abstract: | An important goal of microwave research has now been attained with the development of the technologies needed to fabricate monolithic microwave (mm-wave) integrated circuits. Questions regarding the use of monolithic versus hybrid circuits are investigated. Attention is given to the pros and cons of materials considered for use as monolithic substrates at mm-wave frequencies, the properties of the microstrip, and the effects of shorter wavelengths as the wavelengths become comparable with the microstrip cross section. A novel technology is considered for the fabrication of mm-wave devices utilizing ion-implantation, laser annealing, and unique secondary-ion mass spectrometry diagnostics. |
| URI: | http://hdl.handle.net/1860/2665 |
| Appears in Collections: | Faculty Research and Publications (Biomed Eng)
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