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Please use this identifier to cite or link to this item: http://hdl.handle.net/1860/2665

Title: Silicon as a millimeter-wave monolithically integrated substrate - A new look
Authors: Rosen, Arye
Caulton, Martin
Stabile, Paul
Keywords: Millimeter Waves;Integrated Circuits;Microwave Circuits;Silicon, Substrates;Fabrication;Hybrid Circuits;Ion Implantation;Laser Annealing;Mass Spectroscopy;Microstrip Devices;Technology Utilization
Issue Date: 14-Feb-2008
Abstract: An important goal of microwave research has now been attained with the development of the technologies needed to fabricate monolithic microwave (mm-wave) integrated circuits. Questions regarding the use of monolithic versus hybrid circuits are investigated. Attention is given to the pros and cons of materials considered for use as monolithic substrates at mm-wave frequencies, the properties of the microstrip, and the effects of shorter wavelengths as the wavelengths become comparable with the microstrip cross section. A novel technology is considered for the fabrication of mm-wave devices utilizing ion-implantation, laser annealing, and unique secondary-ion mass spectrometry diagnostics.
URI: http://hdl.handle.net/1860/2665
Appears in Collections:Faculty Research and Publications (Biomed Eng)

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