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Please use this identifier to cite or link to this item: http://hdl.handle.net/1860/2631

Title: Liquid crystal polymer composite films for reconfigurable photomasking applications
Authors: Fox, Anna E.
Fontecchio, Adam K.
Issue Date: 2007
Publisher: American Institute of Physics
Citation: Applied Physics Letters. 91, pp: 141119.
Abstract: We show proof of concept of a real-time reconfigurable photomask fabricated from holographically formed polymer-dispersed liquid crystal !H-PDLC" reflection gratings on etched indium tin oxide patterned electrodes. H-PDLC films were formed using a thiolene based polymer to have a reflection wavelength that modulates 440 nm, the peak sensitivity wavelength of Shipley 1800 series positive photoresist. A working prototype of this adaptable photomask device is shown by comparing patterns formed using the H-PDLC mask and similar patterns formed using a static contact photomask showing that H-PDLC films have the ability to modulate 440 nm light and control the exposure dose of photoresist.
URI: http://hdl.handle.net/1860/2631
Appears in Collections:Faculty Research and Publications (ECE)

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