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Please use this identifier to cite or link to this item: http://hdl.handle.net/1860/1627

Title: Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope
Authors: Kim, Min Jun
McNally, Ben
Murata, Kazuyoshi
Meller, Amit
Issue Date: 23-Apr-2007
Publisher: Institute of Physics
Citation: Nanotechnology, 18(20): pp. 205302.
Abstract: Solid-state nanopores can be used to detect nucleic acid structures at the single molecule level. E-beam has been used to fabricate nanopores in silcon nitride and silicon dioxide membranes, but the pore formation kinetics, and hence its final structure remain poorly understood. With the aid of high-resolution TEM imaging as well as TEM tomography we examine the effect of the SiN material properties on the nanopore structure. In particular, we study the dependence of membrane thickness on nanopore contraction rate for different initial pore sizes. We explain nanopore formation kinetics as a balance of two opposite processes: a) material sputtering, and b) surface tension induced shrinking.
URI: http://dx.doi.org/10.1088/0957-4484/18/20/205302
http://hdl.handle.net/1860/1627
Appears in Collections:Faculty Research and Publications (MEM)

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